Development and improvement of advanced MANUfacturing technologies for MicroElectroMechanical Systems in biomedical applications.
In MANUMEMS project, a thoroughly optimization and automation of the whole manufacturing process of MEMS devices will be achieved, including the evaluation of materials for MEMS manufacturing, the critical steps of the design and manufacturing chain (photolithographic, deposition, etching, dicing processes and so on) as well as the development of other related counterparts (packaging, electronics…) required in the use of biodevices. A very important issue to be considered, it is, all the parameters to be optimized will be adapted to the development of a specific bio-application for quantitative detection of Human Immune-deficiency Virus (HIV); plasma concentrations in diagnosis and follow-up of in an infectious disease. The integration of the functionalization stage of electrochemical sensors (formation of self-assembled monolayers, conjugation of antibodies, deposition of nanoparticles, etc…) for an immunoassay detection of HIV in the manufacturing process will be also accomplished. Optimizing the functional coating process of on-chip immunoassays will decrease the cost, improve the repeatability of the assay and decrease the complexity of analyzing equipment, by eliminating the need for recalibration of each individual sensor